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Glossary

28,959 technical terms and definitions

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3d nand slit etch

gate line slit etch, gls etch 3d nand, sub block slit cut, tsg ssl cut drain select, bsg gsl cut source select, slit bottom punch

Slit etch, usually called gate-line slit or GLS, is the long trench that turns one continuous ONON stack into separate, electrically isolated memory blocks — and it is also…

3d nand slit spacer etch

anisotropic slit spacer, slit sidewall insulation etch, slit floor clear etch, csl isolation spacer

Slit-spacer etch has one very specific job: remove an insulating film from the floor of the slit while leaving it fully intact on the walls, so the trench can be filled without…

3d nand source formation etch

side wall ono removal, swc etch 3d nand, sacrificial source poly strip, source poly recess, lateral channel source connection

Source formation is the etch family that reaches the channel from a direction nothing else in the flow uses: sideways, through the slit, rather than straight down through…

3d nand staircase etch

staircase trim etch, stair etch 3d nand, word line contact landing, chop etch split zone staircase, staircase oxide recess

3D NAND staircase etch spends more process time than almost any other single etch module in the flow, because every one of the 200 to 300-plus word lines buried in the ONON film…

3d nand staircase landing pad etch

step etch 3d nand, staircase pad exposure etch, sin landing pad etch, staircase oxide recess sequence

Step etch is easy to confuse with the trim-etch loop that shapes the staircase, but it is a separate etch with a separate job: once the staircase's shape is fully cut, step etch…

3d nand string current leakage

string select transistor gidl, nand read disturb leakage, ssl gsl leakage nand

3D NAND String Current Leakage A 3D NAND string packs dozens to hundreds of memory cells in series along a single vertical channel, and reading any one of them means passing…

3d nand string current uniformity prediction machine learning

3d nand string current uniformity prediction, 3d nand string, nand string current, string current uniformity, current uniformity prediction, 3d nand, nand string, string current

3D NAND String Current Uniformity Prediction with Machine Learning Introduction & Motivation 3D NAND String Current Uniformity Prediction with Machine Learning addresses a central…

3d nand through array contact etch

tac etch, tav etch 3d nand, through array via, cmos under array contact, dummy oxide region etch

Through-array contact etch, TAC or TAV, is the one etch in the entire 3D NAND flow that deliberately avoids every structure the rest of the process just spent dozens of modules…

3d nand through silicon contact etch

tsc etch, backside via etch bonded nand, xtacking through silicon contact, bonded wafer backside routing

Through-silicon contact, or TSC, is an etch that simply does not exist in a CMOS-under-array chip, because it only becomes necessary once a design has already bonded two separate…

3d nand drain select gate cut

tsg cut etch, ssl cut etch, string select line cut, drain side select gate isolation, top select gate etch

TSG/SSL cut is the shallowest trench etch anywhere in the 3D NAND array, and its entire job is splitting one continuous drain-side select-gate layer into independently switchable…

3d nand vertical string uniformity machine learning

predicting vertical string uniformity in 3d nand architecture, predicting vertical string, vertical string uniformity, string uniformity 3d, uniformity 3d nand, 3d nand architecture

Predicting vertical string uniformity in 3D NAND architecture Introduction & Motivation Predicting vertical string uniformity in 3D NAND architecture addresses a central problem…

3d nand word line contact etch

wlc etch, staircase contact etch, contact to control gate cc, multi depth contact etch, selective contact landing etch

Word-line contact etch is the step that finally reaches every one of the 200 to 300-plus word lines the replacement-gate module just finished building, and it has to do it…

3d nand word line stack uniformity prediction with machine learning

3d nand word line stack uniformity prediction machine learning, 3d nand, word line stack, 3d nand word line stack uniformity prediction, 3d nand word, nand word line

3D NAND Word Line Stack Uniformity Prediction with Machine Learning Introduction & Motivation 3D NAND Word Line Stack Uniformity Prediction with Machine Learning addresses…

3d-object-detection-lidar machine learning

3d object detection lidar, 3d object detection, object detection lidar, 3d object, object detection, detection lidar

3D Object Detection LIDAR Introduction & Motivation 3D Object Detection LIDAR addresses a central problem in vision process control and 3d-detection-bounding-box prediction: how…

3d-object-detection-point-cloud machine learning

3d object detection point cloud, 3d object detection, object detection point, detection point cloud, 3d object, object detection, detection point, point cloud

3D Object Detection Point Cloud Introduction & Motivation 3D Object Detection Point Cloud addresses a central problem in robotics process control…

3d-reconstruction-sfm machine learning

3d reconstruction sfm, 3d reconstruction, reconstruction sfm

3D Reconstruction SFM Introduction & Motivation 3D Reconstruction SFM addresses a central problem in vision process control and structure-motion-camera-pose prediction: how…

3d scene reconstruction

computer vision

3D scene reconstruction is the process of creating three-dimensional models of real-world environments from images or sensor data — recovering the geometry, structure…

3d sequential integration

monolithic 3d, cfet vertical stack, sequential mosfet, 3d si stacking, monolithic 3dic

3D Sequential Monolithic Integration is the advanced transistor stacking technology where multiple active device tiers are fabricated one on top of another on a single wafer using…

3d shape generation

3d generation, generative ai, text to 3d, mesh generation, 3d vision, 3d modeling

3D shape generation is the computational process of synthesizing three-dimensional geometry representations from data, prompts, or procedural rules - it spans meshes, voxels…

3d stacked chip design hbm

3d ic tsv chiplet stack, logic memory stacking, 3d power delivery 3d, 3d thermal management stacked, hbm

High-bandwidth memory (HBM) is DRAM stacked vertically and connected to its host through an interface thousands of bits wide, running beside the processor on an interposer rather…

3d stacked die thermal cross talk prediction machine learning

3d stacked die thermal cross-talk prediction, 3d stacked die, stacked die thermal, die thermal cross-talk, thermal cross-talk prediction, 3d stacked, stacked die

3D Stacked Die Thermal Cross-Talk Prediction with Machine Learning Introduction & Motivation 3D Stacked Die Thermal Cross-Talk Prediction with Machine Learning addresses a central…

3d stacked die thermal gradient prediction machine learning

3d stacked die thermal gradient prediction, 3d stacked die, stacked die thermal, die thermal gradient, thermal gradient prediction, 3d stacked, stacked die, die thermal

3D Stacked Die Thermal Gradient Prediction with Machine Learning Introduction & Motivation 3D Stacked Die Thermal Gradient Prediction with Machine Learning addresses a central…

3d-stacking-thermal-coupling machine learning

3d chip stacking and thermal coupling between layers, 3d chip stacking, chip stacking thermal, stacking thermal coupling, thermal coupling between, coupling between layers, 3d chip

3D Chip Stacking and Thermal Coupling Between Layers Introduction & Motivation 3D Chip Stacking and Thermal Coupling Between Layers addresses a central problem in thermal process…

3d stacking via bonding

3d, advanced packaging

3D Stacking via Bonding is the process of vertically integrating multiple semiconductor dies or wafers by bonding them face-to-face or face-to-back — creating three-dimensional…

3d-tech machine learning

3d stacking and thermal, 3d stacking thermal, 3d stacking, stacking thermal

3D Stacking and Thermal Introduction & Motivation 3D Stacking and Thermal addresses a central problem in thermal process control and thermal-resistance prediction: how to Predict…

3d-thermal-coupling machine learning

3d stacking and thermal coupling management, 3d stacking thermal, stacking thermal coupling, thermal coupling management, 3d stacking, stacking thermal, thermal coupling, coupling management

3D Stacking and Thermal Coupling Management Introduction & Motivation 3D Stacking and Thermal Coupling Management addresses a central problem in thermal process control…

3d thermal hotspot prediction machine learning

predicting hotspot locations and magnitudes in 3d stacked devices, predicting hotspot locations, hotspot locations magnitudes, locations magnitudes 3d, magnitudes 3d stacked, hotspot locations

Predicting hotspot locations and magnitudes in 3D stacked devices Introduction & Motivation Predicting hotspot locations and magnitudes in 3D stacked devices addresses a central…

3d-thermal machine learning

3d stacking and thermal coupling, 3d stacking thermal, stacking thermal coupling, 3d stacking, stacking thermal, thermal coupling

3D Stacking and Thermal Coupling Introduction & Motivation 3D Stacking and Thermal Coupling addresses a central problem in thermal process control and inter-die-thermal…

3d thermal transient analysis prediction machine learning

3d thermal transient analysis prediction, 3d thermal transient, thermal transient analysis, transient analysis prediction, 3d thermal, thermal transient, transient analysis

3D Thermal Transient Analysis Prediction with Machine Learning Introduction & Motivation 3D Thermal Transient Analysis Prediction with Machine Learning addresses a central problem…

3d vision hierarchical sampling

hierarchical sampling methods, multi-resolution sampling

Hierarchical sampling is the two-stage ray-sampling method that allocates more samples to high-importance regions identified by an initial coarse pass - it concentrates compute…

3dfx

what is 3dfx, 3dfx definition

3dfx was a graphics-technology company closely associated with the Voodoo family of PC 3D accelerators. Its role in the 1990s was the acceleration of rendering workloads that were…

3nm node parasitic extraction accuracy prediction machine learning

3nm node parasitic extraction accuracy prediction, 3nm node parasitic, node parasitic extraction, parasitic extraction accuracy, extraction accuracy prediction, 3nm node

3nm Node Parasitic Extraction Accuracy Prediction with Machine Learning Introduction & Motivation 3nm Node Parasitic Extraction Accuracy Prediction with Machine Learning addresses…

4-inch wafer

wafer size, wafer diameter, chips per wafer, wafer-size transition, 100mm wafer

The 4-inch wafer refers to a generation of silicon wafers roughly four inches in diameter that became a widespread manufacturing standard around the late 1970s and early 1980s…

4-kilobit DRAM

4Kb DRAM, Mostek MK4096, address multiplexing, DRAM density generation, memory competition

The 4-kilobit DRAM is the second major density generation of dynamic random-access memory, a chip holding 4,096 bits, four times the capacity of the 1-kilobit generation that…

4-megabit DRAM

4Mb DRAM, elaborate cell capacitor, Korean memory makers, Samsung DRAM, memory competition

The 4-megabit DRAM is the density generation of dynamic memory storing roughly four million bits per chip, four times the 1-megabit generation, reaching the market around the end…

400-layer 3d nand

400 layer 3d nand, 3d nand flash, 3d nand, nand flash memory, 3d nand cua, cmos under array, har etch 3d nand, 400-layer nand flash, cryogenic etch 3d nand, string stacking 3d nand

400-Layer 3D NAND: High-Aspect-Ratio Etch Physics, Multi-Deck Architecture, and the Flash Scaling Moat 400-Layer 3D NAND Flash represents the pinnacle of three-dimensional…

45nm-process

45 nm process, what is 45 nm process

The 45 nm generation is closely associated with Intel’s adoption of high-k and metal-gate transistors. Intel publicly described the materials change in January 2007. The high-k…

48v

busbar, power shelf, datacenter power delivery, rack power delivery, psu, pdu, point of load, voltage regulator module

Datacenter power delivery is the unglamorous logistics problem underneath every AI cluster: taking tens of megawatts from the utility grid and delivering it, at high efficiency…

4d scene

temporal 3d, dynamic scene understanding

4D Scene Understanding extends 3D scene analysis to include temporal dynamics, enabling AI systems to perceive and predict how 3D environments change over time. What Is 4D Scene…

4d-stem

4d stem, four-dimensional stem, four dimensional scanning transmission electron microscopy, pixelated stem, nanobeam diffraction 4d-stem, semiconductor strain mapping 4d-stem

Conventional STEM turns the signal arriving at a detector into one number at each probe position. That number may form an excellent bright-field, annular dark-field, or high-angle…

5 why analysis

quality

5 Why Analysis is a root cause investigation technique that drills down to the fundamental cause of a problem by repeatedly asking "why" each cause occurred — a simple but…

5 whys for equipment

production

5 Whys for equipment is the iterative questioning technique used to move from observed equipment symptom to underlying process or design cause - it is a simple but effective tool…

51-percent-attack-security machine learning

51 percent attack security, 51 percent attack, percent attack security, 51 percent, percent attack, attack security

51 Percent Attack Security Introduction & Motivation 51 Percent Attack Security addresses a central problem in blockchain process control and hashrate-majority-threshold…

5g-6g-baseband-compute machine learning

5g/6g baseband signal processing power, 5g/6g baseband signal, baseband signal processing, signal processing power, 5g/6g baseband, baseband signal, signal processing, processing power

5G/6G Baseband Signal Processing Power Introduction & Motivation 5G/6G Baseband Signal Processing Power addresses a central problem in wireless process control…

5g-6g-baseband machine learning

5g/6g baseband signal processing, 5g/6g baseband signal, baseband signal processing, 5g/6g baseband, baseband signal, signal processing

5G/6G Baseband Signal Processing Introduction & Motivation 5G/6G Baseband Signal Processing addresses a central problem in wireless process control and baseband-power prediction…

5g-6g-baseband-processing-power machine learning

5g/6g baseband signal processing power requirement, 5g/6g baseband signal, baseband signal processing, signal processing power, processing power requirement, 5g/6g baseband

5G/6G Baseband Signal Processing Power Requirement Introduction & Motivation 5G/6G Baseband Signal Processing Power Requirement addresses a central problem in wireless process…

5g-hw machine learning

5g/6g hardware

5G/6G Hardware Introduction & Motivation 5G/6G Hardware addresses a central problem in wireless process control and power prediction: how to Predict power from 5g-hw process…

5g mmwave transceiver phase noise prediction machine learning

5g mmwave transceiver phase noise prediction, 5g mmwave transceiver, mmwave transceiver phase, transceiver phase noise, phase noise prediction, 5g mmwave, mmwave transceiver

5G mmWave Transceiver Phase Noise Prediction with Machine Learning Introduction & Motivation 5G mmWave Transceiver Phase Noise Prediction with Machine Learning addresses a central…

5g6g-hw machine learning

5g/6g baseband hardware, 5g/6g baseband, baseband hardware

5G/6G Baseband Hardware Introduction & Motivation 5G/6G Baseband Hardware addresses a central problem in wireless process control and power prediction: how to Predict power…

5nm node metal pitch scaling prediction machine learning

5nm node metal pitch scaling prediction, 5nm node metal, node metal pitch, metal pitch scaling, pitch scaling prediction, 5nm node, node metal, metal pitch, pitch scaling

5nm Node Metal Pitch Scaling Prediction with Machine Learning Introduction & Motivation 5nm Node Metal Pitch Scaling Prediction with Machine Learning addresses a central problem…