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Glossary

3,801 technical terms and definitions

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selective etch

metrology

Selective Etch is a wet or dry chemical process that removes one material at a significantly higher rate than adjacent materials, exploiting differences in chemical reactivity…

selective soldering

packaging

Selective soldering is the targeted through-hole soldering process that applies molten solder only to designated joints on assembled PCBs - it is preferred for mixed-technology…

selective tungsten deposition

selective metal dep, selective cvd, area selective deposition, bottom up fill

Selective Tungsten Deposition is the chemical vapor deposition technique where tungsten metal grows preferentially on metallic or conductive surfaces while inhibiting growth on…

selective tungsten deposition

selective w cvd, tungsten nucleation selectivity, selective tungsten fill, area selective deposition tungsten

Selective Tungsten Deposition is the area-selective chemical vapor deposition process that nucleates and grows tungsten metal preferentially on metallic surfaces while suppressing…

selectivity

metrology

Selectivity in Metrology refers to the ability to measure target parameters in the presence of interfering materials or signals — isolating the desired measurement…

self aligned double patterning

sadp, saqp, lele patterning, multi patterning litho etch, pitch halving, lithography

Self-aligned multiple patterning is the pitch multiplication technique where sub-lithographic circuit features are defined not by direct optical resolution but through…

self aligned quadruple patterning

saqp, saqp lithography, multipatterning saqp, spacer pattern transfer, advanced pitch splitting, sadp

Self-aligned multiple patterning is the pitch multiplication technique where sub-lithographic circuit features are defined not by direct optical resolution but through…

sem cd measurement accuracy drift machine learning

metrology predicting sem calibration drift for cd measurements, metrology predicting sem, predicting sem calibration, sem calibration drift, calibration drift cd, drift cd measurements

Metrology: Predicting SEM calibration drift for CD measurements Introduction & Motivation Metrology: Predicting SEM calibration drift for CD measurements addresses a central…

SEMATECH

US semiconductor consortium, government-industry collaboration, manufacturing base, precompetitive research, response to Japan

SEMATECH was a consortium of United States semiconductor manufacturers, formed in the late 1980s with government participation, created as a collaborative response to…

semiconductor

deposition, process

Semiconductor Deposition Processes are the thin film fabrication techniques that add layers of conducting, insulating, and semiconducting materials onto wafer surfaces — forming…

semiconductor

roadmap, beyond, 2030, technology, scaling, future, innovation

Semiconductor Roadmap Beyond 2030 is projected semiconductor technology evolution beyond 2030 addressing dimensional scaling limits, new computing paradigms, and heterogeneous…

semiconductor

substrate, engineered, SOI, FD-SOI

Silicon-on-Insulator (SOI) substrate engineering, Fully Depleted SOI (FD-SOI) planar architectures, and dynamic back-gate body biasing constitute the engineered substrate…

semiconductor

metrology, CD, SEM, OCD, measurement

Spectroscopic ellipsometry and inline optical wafer metrology constitute the non-destructive physical measurement and defect detection disciplines that govern yield control across…

semiconductor

IP, protection, anti, counterfeiting, security

Semiconductor IP Protection and Anti-Counterfeiting Strategies is methods and technologies protecting semiconductor intellectual property and preventing counterfeiting, including…