266 technical terms and definitions
pt, laboratory, calibration, round robin, iso 17025, quality, metrology
Proficiency testing is a quality assurance method where laboratories analyze standardized reference samples to verify their testing competence — external organizations provide…
stylus profilometry, optical profilometry, step height measurement, surface profilometer, film step height, stylus scan, cmp dishing profilometry, metrology
Profilometry is the quantitative surface metrology technique used to measure physical step heights, film thickness topography, post-CMP dishing and erosion, and 2D/3D surface…
PLD, user-configurable logic, PAL CPLD FPGA, custom logic without custom chip, reconfigurable chip
A programmable logic device is a chip whose logic function can be configured by the user after manufacture, rather than being fixed when the chip is made, giving designers a way…
projection lithography, photolithography, mask projection, contact printing replacement, wafer exposure
A projection aligner is a photolithography machine that transfers a mask pattern onto a wafer by projecting an image of the mask through a lens system onto the wafer's surface…
proximity lithography, mask gap, contact printing, diffraction limit, shadow printing
Proximity printing is a photolithography method in which the mask is held a small distance above the wafer during exposure rather than pressed directly against it, a compromise…
metrology
Ptychography is a computational imaging technique that recovers both the amplitude and phase of a transmitted wave by scanning a coherent probe across overlapping positions…
off axis illumination lithography, source mask optimization, dipole quadrupole illumination
Pupil Fill and Illumination Source Shape A lithography scanner's illumination doesn't have to fill its pupil uniformly, and for anything near the resolution limit, it shouldn't.…
semiconductor purity, nine nines, 9N purity, electronic-grade polysilicon, Siemens process, ultrapure water, cleanroom contamination
Purity, in semiconductor manufacturing, is the fraction of a material that is the intended element, and it is quoted in nines: 99.9999999 percent, nine nines, usually written 9N…
physical vapor deposition, what is pvd, sputtering, magnetron sputtering, ipvd, ionized pvd, evaporation
Physical vapor deposition is how a fab lays down most of its metal. A solid source material is physically knocked or boiled into a vapor inside a vacuum chamber, and that vapor…
physical vapor deposition chamber, pvd vacuum system, pvd base pressure, pvd chamber pressure, pvd chamber shields, pvd shield kit, pvd chamber seasoning, pvd chamber clean, pvd chamber particles, pvd chamber contamination, pvd chamber matching
A PVD chamber is a coupled vacuum, plasma, material-source, transport, wafer-handling, and contamination-control system. The film is determined not only by target power…
deposition modeling conformal coverage in physical vapor deposition (pvd) processes, deposition modeling conformal, modeling conformal coverage, conformal coverage physical, physical vapor
Deposition: Modeling conformal coverage in physical vapor deposition (PVD) processes Introduction & Motivation Deposition: Modeling conformal coverage in physical vapor deposition…
pvd simulation, physical vapor deposition modeling, sputter deposition modeling, pvd step coverage modeling, sputter transport model, pvd profile simulation, ionized pvd modeling, pvd deposition modeling, sputter step coverage model
PVD modeling is the calculation of where sputtered or evaporated atoms come to rest, and at the roughly 5 mTorr pressure a physical-vapor-deposition chamber runs, the mean free…
physical vapor deposition, sputtering basics
PVD process (physical vapor deposition) is a family of thin-film fabrication methods where solid source material is physically converted to vapor-phase species in vacuum…
solar cell, photovoltaic effect, PV semiconductor, solar module
Photovoltaic. describes direct conversion of light into electrical power by a device whose absorber creates mobile charge carriers and whose built-in asymmetry separates them.…
sram six transistor step 17 l1 l2 l3 cache hierarchy, sram l1 l2 l3 cache hierarchy
Place SRAM in On-Chip Cache Hierarchies: L1, L2, and L3 17. Place SRAM in On-Chip Cache Hierarchies: L1, L2, and L3 As processors grew more complex, the single external cache…
Plasma etching is a fabrication process that uses a chemically reactive, ionized gas to remove material from a wafer's surface in a controlled pattern, enabling the fine…