contact printing mask damage, catadioptric optics working gap, projection lithography reference diagram
The Working Gap That Ended Mask-Wafer Contact Perkin-Elmer's Micralign (1973) — what the gap looks like, and what it bought in yield and mask life One contact event compounds…
manufacturing operations, reliability operations
Reliability is the probability that a system performs its intended function without failure over a specified time and condition - It captures long-term dependability of equipment…
rf modeling, fmax scaling, rf design, maximum oscillation frequency
Radio frequency (RF), millimeter-wave (mmWave), and sub-terahertz semiconductor transistor architectures constitute the core analog frontend and high-frequency mixed-signal…
rf mixer, gilbert cell, frequency converter, downconversion, upconversion, rf transceiver design
mixer is an RF circuit that multiplies signals so energy at one frequency is translated to their sum and difference frequencies. Mixers perform receiver downconversion…
sram six transistor step 6 static power leakage, sram static power leakage current
Measure Static Power as Leakage Through an Always-On Latch 6. Measure Static Power as Leakage Through an Always-On Latch SRAM trades DRAM's refresh-power concern for a different…
term machine learning, Samuel 1959, Mitchell 1997 definition, learning without being explicitly programmed, experience task performance, ML definition
Machine learning is the study of computer programs whose performance on some task improves with experience, as opposed to programs whose behavior is fixed entirely by rules…
barrier metal scaling, copper interconnect electromigration, rc delay interconnect bottleneck, via-first interconnect integration
Via resistance is the electrical resistance of conductive vertical plugs connecting adjacent metal layers in semiconductor interconnects — a critical parameter that increases…
A mixture of experts is a neural network architecture in which a gating network routes each input to only a small subset of specialized "expert" subnetworks rather than passing…
Massive MIMO, or massive multiple-input multiple-output, is a wireless technology that equips a base station with a very large number of antennas, letting it serve many users…
Multi-patterning is a lithography technique that splits a single densely packed layer's pattern across multiple separate exposure and etch steps, achieving finer feature spacing…
inspection, optical inspection, e-beam, aoi, process control, semiconductor metrology, kla, defect detection
Metrology & Inspection: Seeing the Unseen — Nanoscale Defect Physics, Machine Vision & Yield Economics In semiconductor manufacturing, you cannot improve what you cannot measure.…