support vector machines for classification

SVM (Support Vector Machine) for semiconductor classification is the application of maximum-margin classifiers to separate process conditions or wafer types — finding the hyperplane that maximally separates classes in feature space, with kernel functions handling non-linear boundaries.

How Does SVM Work?

  • Margin: Find the hyperplane that maximizes the distance to the nearest data points (support vectors).
  • Kernel Trick: Map data to higher-dimensional space (RBF, polynomial kernels) for non-linear boundaries.
  • Soft Margin: Allow some misclassifications (controlled by parameter C) for noisy data.
  • Multi-Class: One-vs-one or one-vs-all strategies for multi-class problems.

Why It Matters

  • Small Datasets: SVMs excel when training data is limited — common early in a new process development.
  • Feature Space: Kernel SVMs can model complex, non-linear decision boundaries efficiently.
  • Defect Classification: Effective for wafer map pattern classification and defect type identification.

SVM is the maximum-margin classifier — finding the widest possible gap between classes for robust classification of semiconductor data.

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