POLY1

# POLY1 / POLY2

POLY1 and POLY2 identify separately patterned polysilicon levels in a named technology.

## Use the technology layer map

A numbered level identifies an integration location. Its material, electrical role and neighboring dielectric must be read from the actual cross-section and process design kit.

## Integration context

They may serve different functions in memory, analog or other integrated devices. Their presence does not establish which is a floating gate, control gate or resistor without the process definition. Inter-poly insulation is distinct from the gate dielectric between a gate and substrate.

## What to verify

Use the layer map and cross-section together; do not assume POLY2 is simply another name for the same gate.

Before selecting removal conditions, identify all exposed neighboring materials and the amount of loss each can tolerate. Verify the result using the measurements appropriate to the structure, then check that the surface is suitable for the next deposition, contact or clean step.

## Related terminology

POLY1, POLY2, poly1 poly2. Short abbreviations are local process vocabulary and can have other meanings; use the full module name when searching.

## Source and scope

[Fabrication and etch resources](https://www.cleanroom.byu.edu/processes). The diagram is an original teaching schematic. Layer choices and process families describe an example rather than a universal manufacturing recipe.