bevel edge

Bevel Edge refers to the angled profile machined into wafer edges during manufacturing, typically at 15-22° angles to reduce chipping and improve handling.

## What Is a Bevel Edge?

• Geometry: Angled cut from wafer face to edge, 15-22° typical
• Standard: SEMI M1 specifies edge profile parameters
• Purpose: Reduce stress concentrations, ease film coating
• Types: Single bevel, double bevel, rounded bevel

## Why Bevel Edge Profile Matters

Proper bevel geometry affects epitaxial growth uniformity, photoresist edge coating, and mechanical handling robustness throughout processing.

SEMI M1 Edge Parameters:
| Parameter | 200mm | 300mm |
|-----------|-------|-------|
| Bevel angle | 18-22° | 18-22° |
| Edge exclusion | 3mm | 2mm |
| Edge lip | <0.5μm | <0.5μm |
| Edge chips | None visible | None visible |

300mm wafers use tighter edge specifications due to higher processing costs per wafer.