aluminum

# Aluminum (Al)

Al is the chemical symbol for aluminum, a conductor used in many interconnect and pad schemes.

## Connect the name to its role

Document whether this film is a target, mask, liner, electrode or temporary layer at the step being discussed. The same material can have different roles in different modules.

## Integration context

An exposed aluminum surface develops an oxide. A subtractive metal process must first establish access to the metal and then control its lateral dimensions. Aluminum interconnect is not interchangeable with copper damascene processing.

## What to verify

Check continuity, line width, residual material and corrosion after subsequent handling.

Before selecting removal conditions, identify all exposed neighboring materials and the amount of loss each can tolerate. Verify the result using the measurements appropriate to the structure, then check that the surface is suitable for the next deposition, contact or clean step.

## Related terminology

aluminum, aluminium, Al. Short abbreviations are local process vocabulary and can have other meanings; use the full module name when searching.

## Source and scope

[Aluminum etch and corrosion control](https://www.nanofab.ualberta.ca/avoiding-corrosion-when-dry-etching-aluminum/). The diagram is an original teaching schematic. Layer choices and process families describe an example rather than a universal manufacturing recipe.